Plasma parameters and composition in HBr and binary HBr+Ar, He, N2 gas mixtures under the conditions of RF inductive discharge
DOI:
https://doi.org/10.18321/Keywords:
plasma, binary mixtures, induction discharge, diagnosticsAbstract
The influence of gas mixing ratio in HBr+X, where X=Ar, He or N2 mixtures on both plasma parameters and densities of plasma active species was analyzed by the combination of plasma diagnostics and plasma modeling. It was shown that the steady-state plasma composition in pure HBr is determined by the atommolecular reactions. The dilution of HBr by any mentioned gas at constant gas pressure influences the kinetics of electron-impact processes through the changes of mean electron energy and formation-decay balance for charged species.
References
(1). Айнспрук Н., Браун Д. Плазменная технология в производстве СБИС. — М.: Мир, 1987. — 420 с.
(2). Layadi N., Colonell J.I., Lee J. // Bell Labs Tech. J. 1999. Vol. 4. P. 155.
(3). Mahorowala A.P., Sawin H.H., Jones R., Labun A.H. // J. Vac. Sci. Technol. B. 2002. Vol. 20. P. 1055.
(4). Kim M., Min N.K., Yun S.J., Lee H.W., Efremov A., Kwon K.H. // Microelectron. Eng. 2008. Vol. 85. P. 348.
(5). Efremov A., Choi B.G., Nahm S., Lee H.W., Min N.K., Kwon K.H. // J. Korean Phys. Soc. 2008. Vol. 52. P. 48.
(6). Lieberman M.A., Lichtenberg A.J. Principles of Plasma Discharges and Materials Processing. — New York: John Wiley & Sons Inc., 1994.
(7). Lee C., Lieberman M.A. // J. Vac. Sci. Technol. A. 1995. Vol. 13. P. 368.
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Copyright (c) 2014 А.А. Клюшкин, А.М. Ефремов
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