Структура и механические свойства углеродных пленок, полученных методом кислородно-ацетиленовой горелки

Е.С. Меркибаев; R. Fuchs; Б.З. Мансуров; Б.С. Медянова; А.К. Кенжегулов; А. Толеген; Б.Т. Лесбаев; Б.А. Алиев

doi:10.18321/

Authors

Е.S. Мerkibayev Al-Farabi Kazakh National University, Physico-Technical Faculty, 050040, al-Farabi ave., 71, Аlmaty, Kazakhstan
R. Fuchs Institute of Materials Engineering, University of Siegen, Paul-Bonatz-Straße 9-11, 57076, Siegen, Germany
B.Z. Мansurov Al-Farabi Kazakh National University, Physico-Technical Faculty, 050040, al-Farabi ave., 71, Аlmaty, Kazakhstan
B.S. Мedyanova Al-Farabi Kazakh National University, Physico-Technical Faculty, 050040, al-Farabi ave., 71, Аlmaty, Kazakhstan
А.K. Kenzhegulov Al-Farabi Kazakh National University, Physico-Technical Faculty, 050040, al-Farabi ave., 71, Аlmaty, Kazakhstan
А. Тolegen Al-Farabi Kazakh National University, Physico-Technical Faculty, 050040, al-Farabi ave., 71, Аlmaty, Kazakhstan
B.Т. Lesbayev The Institute of Combustion Problems, 050012, Bogenbay batyr st., 172, Almaty, Kazakhstan
B.А. Аliyev Al-Farabi Kazakh National University, Physico-Technical Faculty, 050040, al-Farabi ave., 71, Аlmaty, Kazakhstan

DOI:

https://doi.org/10.18321/

Keywords:

carbon films, combustion, synthesis, silicon

Abstract

The experimental results on the synthesis of carbon films on the surface of silicon plates prepared by the method of oxygen-acetylene torch are given. The obtained samples were investigated by methods of combinational dispersion of light, atomic-force microscope and a nanoindentation. The offered technique allows to deposit with rather high speeds a range of carbon materials from graphite-like to glassy carbon on a surface of practically any materials.

References

(1) May P. W. Diamond thin films: a 21st-century material // Phil. Trans. R. Soc. Lond. A. 2000. V. 358. P. 473–495.

(2) Krueger A. Carbon Materials and Nanotechnology. Weinheim: WILEY-VCH Verlag GmbH & Co. KGaA, 2010. 475 p. ISBN 978-3-527-31803-2.

(3) Lee S. T., Lin Z., Jiang X. CVD diamond films: nucleation and growth // Materials Science and Engineering. 1999. V. 25. P. 123–154.

(4) Schmitt M., Bistac S. Nanofriction of diamond coatings obtained by flame process // Journal of Physics: Conference Series. 2007. V. 61. P. 1027–1031.

(5) Rozbicki R. T., Sarin V. K. A technique for large area deposition of diamond via combustion flame synthesis // Thin Solid Films. 1998. V. 332. P. 87–92.

(6) Chu P. K., Li L. Characterization of amorphous and nanocrystalline carbon films // Materials Chemistry and Physics. 2006. V. 96. P. 253–277.

(7) Букалов С. С., и др. Исследование строения графитов и некоторых других sp² углеродных материалов методами микро-спектроскопии КР и рентгеновской дифрактометрии // Российский химический журнал (Журнал Российского химического общества им. Д. И. Менделеева). 2006. Т. L, № 1. С. 83–91.

(8) Ferrari A. C. Raman spectroscopy of graphene and graphite: Disorder, electron–phonon coupling, doping and nonadiabatic effects // Solid State Communications. 2007. V. 143. P. 47–57.

(9) Ferrari A. C., Robertson J. Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond // Phil. Trans. R. Soc. Lond. A. 2004. V. 362. P. 2477–2512.

(10) Головин Ю. И. Наноиндентирование и механические свойства твёрдых тел в субмикрообъёмах, тонких приповерхностных слоях и плёнках // Физика твёрдого тела. 2008. Т. 50, вып. 12. С. 2113–2142.

(11) Fischer-Cripps A. C. Nanoindentation. 3rd ed. Springer, 2011. 279 p.

(12) Меркибаев Е. С., и др. Синтез углеродных плёнок методом кислородно-ацетиленовой горелки // Материалы симпозиума «Горение и плазмохимия». Алматы, 18–19 сентября 2013 г. С. 286–291.