STUDY OF RADIAL DISTRIBUTION OF CONCNETRATIONS OF ARGON METASTABLE ATOMS IN A GLOW DISCHARGE. DETERMINATION OF REFLECT COEFFICIENT
Keywords:
low-temperature plasma, metastable atoms, glow discharge, the reflectanceAbstract
The measurements of the radial profiles of Ar(3P2) metastable atom density in dc glow discharge in argon were carried out. Discharge tubes with clean glass inner surface and with surface covered by carbonitride or carbon film were used. Measured profiles were compared with those calculated, and the reflection coefficient of Ar(3P2) atoms was estimated.
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