MEASUREMENT OF PLASMA PARAMETERS IN A HIGH-CURRENT СBD IN MIXTURES OF HE+AR, HE+XE
Keywords:
plasma, generation, density, gas, pressure, combined barrier dischargeAbstract
The results of experimental studies of the combined barrier discharge (CBD) in the mixtures of inert gases are presented in this paper. The high-current regime of CBD was induced by superposition of a high-voltage pulse with a short leading edge on the stationary sinusoidal dielectric barrier discharge. It is shown that the superposition of high-voltage pulse in a certain phase of the sinusoidal voltage can increase the density of the discharge plasma up to ne = 1013 cm-3.
References
(1) Paris S., Aints M., Laan M. And Valk F. // J.Phys, D: Appl. Phys. 2004. V. 37. P. 1179. https://doi.org/10.1088/0022-3727/37/8/005
(2) Ivkovic S., Stefenovic G., Obradovic B., Cvetanovic N. and Kuraica M. J. // Phys, D: Appl. Phys. 2014. V. 47. 055204 (10PP). https://doi.org/10.1088/0022-3727/47/5/055204
(3) Laux C., Spence T., Kruger C. and Zare R. // Plasma Sources Sci. Technol. 2003. V. 12. P. 125. https://doi.org/10.1088/0963-0252/12/2/301