SEM STUDY of SiC and C NANOSTRUCTURES OBTAINED by the METHOD of MW-CVD
Keywords:
nanostructures of silicon carbide and carbon, chemical deposition from the gas phase, microwave plasma, porous silicon.Abstract
In this article are presented results of experiments on the synthesis of SiC and C nanostructures (NS) by chemical vapor deposition in microwave plasma. The plates of polished monocrystalline and porous silicon were used as substrates. Studies by scanning electron microscopy showed that formed NS have a diameter of 200-350 nm and rough surface. The formation of NS on the polished Si occurs on the SiC buffer layer. Analysis of SEM images of the sample shows that growth of NS on the surface of porous silicon is more widespread in contrast to the polished Si. The results of studies by Raman scattering confirmed that SiC film with structure of 3C-SiC is formed on the polished Si. Besides, need to note the presence of main carbon peaks on both types of substrates in the range of 1338.2 and 1583 cm-1, which correspond to the carbon nanostructures.
References
(1) В.Л. Кузнецов, А.Н. Усольцева, И.Н. Мазов. Общие закономерности формирования углеродных наноструктур и нитевидных кристаллов карбида кремния на поверхности металлических катализаторов // Рос. Хим. Ж. – 2004 – Т. XLVIII – №5 – С. 37-45.
(2) Weimin Zhou, Yafei Zhang, Xiaoming Niu, and Guoquan Min. One-Dimensional SiC Nanostructures: Synthesis and Properties // 2008 – Chapter 2. – P. 17-44. 3. Бережкова Г.В. Нитевидные кристаллы. М.: Наука, 1969, с. 159.
(4) Chrysanthou A., Grieveson P. J. Mater. Sei., 1991, v. 26, p. 3463-3476. https://doi.org/10.1007/BF00557132
(5) Junho Jeong, Gwiy-Sang Chung, Shigehiro Nishino. Raman Scattering Investigation of Polycrystalline 3C-SiC Film Deposited on SiO2 by Using APCVD with Hexamethyldisilane // Journal of the Korean Physical Society. – 2008. – Vol. 52. – No. 1. – P.43-47. https://doi.org/10.3938/jkps.52.43
(6) Feng-Ming Liu, Bin Ren, Jia-Wei Yan, Bing-Wei Mao, Zhong-Qun Tian. Initial Oxidation Processes on Hydrogenated Silicon Surfaces Studied by In Situ Raman Spectroscopy // Journal of the Electrochemical Society. – 2002 – Vol.149 – P. 95-99. https://doi.org/10.1149/1.1426400
(7) Keith B. Dillon, David W. H. Rankin. Spectroscopic Properties of Inorganic and Organometallic Compounds // Royal Society of Chemistry. – 20 December, 2000. – Vol.33 – P. 311.
(8) Giuseppe Perna, Maria Lasalvia, Crescenzio Gallo, Giuseppe Quartucci and Vito Capozzi. Vibrational Characterization of Synthetic Eumelanin by Means of Raman and Surface Enhanced Raman Scattering // The Open Surface Science Journal. – 2013. – Vol.5 – P.1-8. https://doi.org/10.2174/1876531901305010001
(9) Ihtesham ur Rehman, Zanyar Movasaghi, Shazza Rehman. Vibrational Spectroscopy for Tissue Analysis // Series in Medical Physics and Biomedical Engineering. – 27 September 2012 – P.281.
(10) Sebastien Nanot, Nicholas A.Thompson, i-Hee Kim, Xuan Wang, William D.Rice, Erik H. Hároz, Yogeeswaran Ganesan, Cary L.Pint, Junichiro Kono. Single-Walled Carbon Nanotubes // Springer Handbook of Nanomaterials. – 2013 – Part A/4. – P.118-119.
(11) Zheng Yan, Andrew R. Barron. Characterization of graphene by Raman spectroscopy // Режим доступа: http://cnx.org/content/m34667/1.2/
(12) D. Wang, C. Xue, H. Bai, N. Jiang, Silicon carbide nanowires grown on graphene sheets, Ceramics International, http://dx.doi.org/10.1016/j.ceramint.2014.12.117
